SHADE-Sputtering High-purity Atomic Deposition Experiment

Sputtering High-purity Atomic Deposition Experiment (SHADE) The SHADE chamber utilizes an ultra-high vacuum environment with a dual magnetron setup to deposit thin films and a secondary RF antenna in order to tailor the deposited film properties. SHADE is a valuable research tool allowing for a variety of sputtering targets to easily be exchanged and a […]